XRD-OEM

inline-testing tool | fully automated measurement & handling of ingots, boules or panels

 

 

Technical Specifcation

 

measurable materials: Si, SiC, GaAs and many more

 

sample size: ingots up to 450 mm diameter

 

cooling: air, low noise

 

possible applications: pre-alignment of large ingots prior to sawing/grinding | flat/notch detection

 

 

 

Features of XRD-OEM

  • Ready for integration for any automation or processing system

  • Designed for harsh environments (grinding, sawing)

  • Compact, standard industrial interfaces

  • Independent orientation measurement

  • Measurements on flat surface or circumferences

  • Optical notch detection


    Application example

    Orientation of silicon ingots:

    • detection of flat and notch position prior to grinding

    • diameter up to 8''

    • length up to 40 cm